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A block on the old chip

Published:24 October 2017Publication History
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Abstract

Block copolymers may help transistors shrink to tinier dimensions.

References

  1. Self-Assembly: Lego Blocks in Nature Paul Nealey, University of Chicago https://vimeo.com/138700499Google ScholarGoogle Scholar
  2. Suh, H.S., Kim, D.H., Moni, P., Xiong, S., Ocola, L.E., Zaluzec, N., Gleason, K., and Nealey, P.F. Sub-10-nm patterning via directed self-assembly of block copolymer films with a vapour-phase deposited topcoat, Nature Nanotechnology 12, 2017 http://www.nature.com/nnano/journal/v12/n6/full/nnano.2017.34.htmlGoogle ScholarGoogle ScholarCross RefCross Ref
  3. Sinturel, C., Bates, F.S., and Hillmyer, M.A. High ¿-Low N Block Polymers: How Far Can We Go?, ACS Macro Letters 4, 2015.Google ScholarGoogle Scholar
  4. Jiang, J., Jacobs, A., Thompson, M. O., and Ober, C. K. Laser spike annealing of DSA photoresists, J Photopolymer Science and Technology 28, 2015. https://www.jstage.jst.go.jp/article/photopolymer/28/5/28_631/_articleGoogle ScholarGoogle Scholar
  5. Lane, A.P., Maher, M.J., Willson, C.G., and Ellison, C.J. Photopatterning of Block Copolymer Thin Films, ACS Macro Letters 5, 2016Google ScholarGoogle ScholarCross RefCross Ref

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  1. A block on the old chip

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      • Published in

        cover image Communications of the ACM
        Communications of the ACM  Volume 60, Issue 11
        November 2017
        95 pages
        ISSN:0001-0782
        EISSN:1557-7317
        DOI:10.1145/3154816
        Issue’s Table of Contents

        Copyright © 2017 ACM

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        Association for Computing Machinery

        New York, NY, United States

        Publication History

        • Published: 24 October 2017

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